In principle, the highest resolution in each case is obtained with the shortest wavelengths — X-rays or γ-rays. In microscopy and microlithography, the spatial resolution of the optical system ...
Recognition of decades-long commitment to the semiconductor industry. Oberkochen, Germany / San José, USA -- Winfried Kaiser, head of Product Strategy of ZEISS Semiconductor Manufacturing Technology ...
Dr. Andreas Erdmann, head of the Computational Lithography and Optics group at Fraunhofer IISB for decades and SPIE (International Society for Optics and Photonics) Fellow since 2016, has been honored ...
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