Inside an ASML TWINSCAN machine | ASML | 37 comments
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Inside an ASML TWINSCAN machine | ASML | 37 comments
37 viewsSep 17, 2023
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ASML engineers and technicians work in a high-tech environment where cleanroom processes, module builds, and hands-on training come together to produce the world’s most advanced lithography systems used in semiconductor production. | ASML
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ASML engineers and technicians work in a high-tech environment w…
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29K views · 402 reactions | 【ASML 週報｜誰能比它快！眨眼間就有 7G 的加速度高速移動】 猜猜看，由...
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29K views · 402 reactions | 【ASML 週報｜誰能比它快！眨眼間就有 7…
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＼ASML Tech｜まばたきより早い7Gの加速度／ ASMLが製造するTWINSCAN NXTでは、1時間に何枚のウェハを露光できると思いますか？ 答えは295枚です！ これまでのTWINSCANモデルと比べると、1日に400〜500枚のウェハを追加で処理できるようになりました。 TWINSCANモデルの特徴は、同時に2枚のシリコンウェハを処理できること。片方のウェハステージが「露光」を行っている間に、もう一方のウェハステージでは「計測」を行っています。この同時処理を実現するためには、ウェハを最大7Gで加速させる必要があります。 #7Gとは？F1カーに例えてみると… 👉 F1カーは0〜100km/hまで平均約2.5秒かかります 👉 7Gの加速度で0〜100km/hまで約0.4秒しかかかりません！ 実は、7Gの加速度は人のまばたきよりも早いんです。 #動画の製造プロセスを解説！ TWINSCANのデュアルステージは、メカトロニクス、光学設計、計測（データ処理、制御を含む）を統合して行うことができるモジュールです。 👉 右側のウェハステージ：露光 DUV（深紫外線）によって露光され
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ASML Developing Next-Gen EUV Lithography
ASML Developing Next-Gen EUV Lithography
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